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Abstract Uniform and compact nanocrystalline diamond thin films were deposited on quartz tube substrate with the gas mixture of ethanol and hydrogen by microwave plasma CVD equipment which has a novel type of resonance cavity. The quality of diamond thin films were tested by SEM, Raman spectroscopy and XRD. A corrosion experiment was designed to test the anti-corrosion effect of diamond thin films. The results showed that when the reaction pressure is 5.5 kPa, the ethanol concentration is 8 vo l%, the reaction temperature is 500 oC, the nanocrystalline diamond thin film could be obtained, which is able to enhance the anti-corrosion
Performance of quartz tube.
Abstract On the microwave plasma CVD apparatus with a new resonant cavity, a uniform and dense nano-diamond film was deposited on the outer surface of the quartz glass tube using ethanol and hydrogen as working gases. The quality of the diamond film was characterized by scanning electron microscopy, Raman spectroscopy and X-ray diffraction. The corrosion test of the diamond film was tested by design corrosion test. The results show that the nano-diamond film can effectively enhance the corrosion resistance of quartz glass tube under the conditions of reaction pressure of 5.5 kPa, carbon source concentration of 8 vo1% and quartz glass tube temperature of 500oC. (Diamond and Abrasives Engineering, 2009, Issue 1)